Mks instruments 1479a11cr1bmspcal mass flow controller. The mks instruments 1179a 2179a massflo controller and the type 2179a massflo controller with a positive shutoff valve, accurately measure and control the mass flow rates of gases. A mass flow controller is designed and calibrated to control a specific type of liquid or gas at a particular. P4b multigas, multirange, programmable, metalsealed, digital. This conforms to the enhanced mfc profile, device type 27hex. Two controllers can be combined to provide two gas ratio control. New mks 2258c mass flow controller 200 sccm, viton seal.
The laptop is ready for ethernet communication with mks mfc devices. View and download mks 579a instruction manual online. Key reasons why our mass flow sensors are the most widely used worldwide include. The original pk4 laboratory module already features a ge50a mass flow controller and other mks instruments such as the 750c high pressure baratron absolute capacitance manometer, a 640b absolute pressure controller and a 910 absolute piezo vacuum transducer. If the gas were n2, the gas flow would be, 100 sccm x gcfn2 gcfar 100 sccm x 1. Pfc50 and pfc60 mass flow controller operation manual. The mks type 649a pressure controller with an integral mass flow meter combines pressure control and flow metering capabilities into one compact unit. The mks type 250e pressureflow controller will control any one of a variety of flow valves to accurately maintain a set pressure or flow. The 1179c is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. Mass flow controllers pressure controllers valves capacitance manometers.
The mks type 1152c mass flow controller mfc is designed for precise and repeatable mass flow control of most low vapor pressure liquid or solid source materials into low pressure processes such. The arc mutants of arabidopsis with fewer large chloroplasts have a lower mesophyll conductance. The vogtlin product lineup covers thermal mass flow meters and mass flow controllers for gases and the first longlife integrated battery mass flow meter with builtin touch display. The 1179 mass flo controllers are available with full scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0. Kjlc offers a variety of mass flow controllers mfc from manufacturers like mks instruments and fujikin. I have few mass flow controllers without the device which control them.
Required for a mass flow controller, a device that contains a valve and a. When using the gcf, the accuracy of the flow reading. Mass flow controller marketmass flow controller market. Mks warrants that for one 1 year from the date of shipment the equipment described above the equipment. The mfc can be given a setpoint from 0 to 100% of its full scale range but is typically operated in the 10 to 90% of full scale where the best accuracy is achieved. Digital mass flow controller, digital mass flow meter. Mfctm digital mass flow controller instruction manual. Used vacuum measurement used vacuum equipment bmi surplus.
Jul 03, 20 the pseries mfcs, with full scale ranges from 5 sccm to 250 slm nitrogen equivalent are designed for critical mass flow applications like those required in semiconductor and high end mocvd. The type 179a massflo meter measures the flow rate of gases. Mass flow controller with labview ni community national. Mks type 649a pressure controller with an integral mass. Mks type 649a pressure controller with an integral mass flow. Please refer to the inside of the back cover of this manual for a list of mks calibration and. Mass flow controller gas correction factors for common gases are available at. The mks type 1152c mass flow controller mfc is designed for precise and repeatable mass flow control of most low vapor pressure liquid or solid source materials into low pressure processes such as low pressure chemical vapor deposition lpcvd, metal organic molecular beam epitaxy mombe, and others. These devices are essential to most thermal and dry etching processes. A mass flow controller is designed and calibrated to control a specific type of liquid or gas at a particular range of flow rates. Guideline for temperature specifications of the mass flow controller 9 semi e27000092. Mksi is proud to announce that another one of its ge50a mass flow controller mfc products has been installed in.
The embedded web browser application allows changes in gas. The type 1479 massflo controller is available with full scales from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0. Mks instruments datasheets groundbreaking solutions. Dynamics in logistics in this case only one mks mass flow controller is used with maximum capacity of 20 sccm. Our wide range of mass flow controllers are available with thermal or pressure based sensors, analog and digital communication and metal or elastomer seals. Flow rates can be roughly classified into two types. Coastal instruments mass flow controller specialists since 1980.
Definitions of warning, caution, and note messages. Massflo is a registered trademark of mks instruments, inc. General information introduction the mks type 246c single channel power supplyreadout is designed as a power supplyreadout and set point source for one analog mass flow. Sep 09, 2015 pseries high performance mfcs feature full digital control architecture for fast response to setpoint over the operable device range. A typical mass flow controlled simply accepts a voltage 05v and sets the flow proportional to that voltage, independent of gas or fluid pressure.
Mks instruments applies leading edge science, engineering and technology to solve critical challenges across a number of major markets. The control unit pr4000f is designed for the use with mass flow controllers mfc, mass flow meters mfm, pressure transducers and inlinepressure controllers, e. Realtime accurate flow control that is insensitive to upstream and downstream. An mks mass flow controller model mks 647a shown, was used to control the flow of gasses into the furnace11 figure 3.
The 1179 massflo controllers are available with full scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0. A conventional mass flow controller only guarantees the flow rate accuracy with n2 gas and one controller would only handle one type of gas and one full scale flow rate range. A mass flow controller automatically controls the flow rate of a gas according to a set flow rate sent as an electric signal, without being affected by use conditions or changes in gas pressure. A mass flow controller mfc is a closedloop device that sets, measures, and controls the flow of a particular gas or liquid. The type 579ab of this series, however, is a mass flow meter for mass flow measurement only, therefore without a control valve. The purge flow, 500 sccm standard cu bic centimetres per minute, was regulated with a temper ature stabilized mass flow controller mks massflo, n2, 1 standard litre per min. General information introduction the mks type 246c single channel power supplyreadout is designed as a power supplyreadout and set point source for one analog mass flow controller mfc. Mks warrants that for one 1 year from the date of shipment the equipment described above the.
The ge50a is used to control the flow of neon, argon and mixtures of both gases. A mass flow controller mfc is a device used to measure and control the flow of liquids and gases. Dear all, first of all i have to say i am a chemist not an engineer. Ge50a elastomersealed, digital mass flow controller. Mfc mass flow controller includes technology improvements in functionality and performance to help users in semiconductor and high purity thinfilm applications increase tool throughput and reduce overall system costs. Accurate, reliable gas flow delivery and control is crucial to many of todays advanced processes. Our highprecision devices come equipped with digital and analog interface, ip67nema6 protection and atex certification. The mks 1479 series mass flow controllers are an economical metalsealed mass flow controller designed to measure and control the flow of gases in high purity applications the type 1479 massflo controller is available with full scales from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0. Not supported in a mass flow meter device an mfc without a valve or a controller. Type 1179 massflo controllers are available with full scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.
Installing an mks flow controller as a replacement would result in. Mks instruments 1179a 2179a massflo controller in stock. From thermal flow sensors and mass flow metering systems, we continually launch new products and enhance existing systems to unlock new levels of thermal mass flow measurement precision. The mks type 1479 is an economical metalsealed mass flow controller designed to measure and control the flow of gases in high purity applications. Devicenet supplemental manual for gf100 series mass flow. The unit can also power and monitor the flow rate through an analog mass flow meter mfm. The mks type 247d fourchannel mass flow controller power supplyreadout is. The mks type 1179 is a general purpose mass flow controller designed to measure and control the flow of.
General purpose 10 sccm to 20 slm mass flow controller mks. Mfc tm digital mass flow controller low pressure mks instruments, inc. The 649 pressure controller includes a baratron capacitance manometer, proportioning control valve, closedloop electronics, and patented thermal mass flow sensor. The ge50a is a general purpose, elastomer sealed mfc well suited for a wide variety of. You seems to think that you need to do the pid regulation yourself, but all that is typically embedded in the controller. The mks massflo meter and controller 1500 series of instruments accurately measure and control the mass flow rate of gases. Mks recommends that all mks pressure and flow products be calibrated. Mfcs are available in thermal and pressure based sensor technologies, analog and digital communication, and metal or elastomer seals. The 250 controller can provide a 15 vdc output and accepts inputs from a variety of pressure transducers and mass flow meters. The one pressure channel and up to four flow channels are.
From thermal flow sensors and mass flow metering systems, we continually launch new products and enhance existing systems to unlock new levels of thermal mass flow measurement precision, responsiveness, accuracy and repeatability. M100 mks instruments pdf catalogs technical documentation. Ip66 rated, metal sealed, digital mass flow controller, im50a datasheet, im50a circuit, im50a data sheet. Mks gseries mass flow controllers instruction manual. Up to eight gas mass flow channels and one pressure channel allow for independent or ratiobased gas flow control. Get the best deals on mass flow controllers when you shop the largest online selection at. Dynamics in logistics in this case only one mks mass flow controller is used. Mks, alldatasheet, datasheet, datasheet search site for. Warranty gseries mass flow controllers mks instruments, inc. Based upon an mks measurement technique, patent pending. Compatibility is just restricted in case of disagreement of electrical specifications. Required for a mass flow controller, a device that contains a valve and a controller.